• 文献标题:   A simple and scalable route to wafer-size patterned graphene
  • 文献类型:   Article
  • 作  者:   LIU LH, ZORN G, CASTNER DG, SOLANKI R, LERNER MM, YAN MD
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF MATERIALS CHEMISTRY
  • ISSN:   0959-9428
  • 通讯作者地址:   Portland State Univ
  • 被引频次:   60
  • DOI:   10.1039/c0jm00509f
  • 出版年:   2010

▎ 摘  要

Producing large-scale graphene films with controllable patterns is an essential component of graphene-based nanodevice fabrication. Current methods of graphene pattern preparation involve either high cost, low throughput patterning processes or sophisticated instruments, hindering their large-scale fabrication and practical applications. We report a simple, effective, and reproducible approach for patterning graphene films with controllable feature sizes and shapes. The patterns were generated using a versatile photocoupling chemistry. Features from micrometres to centimetres were fabricated using a conventional photolithography process. This method is simple, general, and applicable to a wide range of substrates including silicon wafers, glass slides, and metal films.