• 文献标题:   Integrated wafer-scale ultra-flat graphene by gradient surface energy modulation
  • 文献类型:   Article
  • 作  者:   GAO X, ZHENG LM, LUO F, QIAN J, WANG JY, YAN MZ, WANG WD, WU QC, TANG JC, CAO YS, TAN CW, TANG JL, ZHU MJ, WANG YN, LI YLZ, SUN LZ, GAO GH, YIN JB, LIN L, LIU ZF, QIN SQ, PENG HL
  • 作者关键词:  
  • 出版物名称:   NATURE COMMUNICATIONS
  • ISSN:  
  • 通讯作者地址:  
  • 被引频次:   6
  • DOI:   10.1038/s41467-022-33135-w
  • 出版年:   2022

▎ 摘  要

The integration of large-scale two-dimensional (2D) materials onto semiconductor wafers is highly desirable for advanced electronic devices, but challenges such as transfer-related crack, contamination, wrinkle and doping remain. Here, we developed a generic method by gradient surface energy modulation, leading to a reliable adhesion and release of graphene onto target wafers. The as-obtained wafer-scale graphene exhibited a damage-free, clean, and ultra-flat surface with negligible doping, resulting in uniform sheet resistance with only similar to 6% deviation. The as-transferred graphene on SiO2/Si exhibited high carrier mobility reaching up similar to 10,000 cm(2) V-1 s(-1), with quantum Hall effect (QHE) observed at room temperature. Fractional quantum Hall effect (FQHE) appeared at 1.7 K after encapsulation by h-BN, yielding ultra-high mobility of similar to 280,000 cm(2) V--(1) s(-1). Integrated wafer-scale graphene thermal emitters exhibited significant broadband emission in near-infrared (NIR) spectrum. Overall, the proposed methodology is promising for future integration of wafer-scale 2D materials in advanced electronics and optoelectronics.