▎ 摘 要
For the goal of developing biocompatible sensors and electronics for in vivo applications, we report the first graphene field effect transistors (GFETs) fabricated on microbial cellulose (MBC), a biointegrative and ultraflexible biopolymer membrane. GFETs on MBC are fabricated in a wafer-scale using a transferred CVD graphene with a mobility of >1700 cm(2)/Vs. With an excellent ohmic contact resistance of below 0.1 Omega mm, and a high transconductance of G(m) similar to 260 mS/mm with I-ds similar to 380 mA/mm at V-ds = 1V, very promising RF performance was demonstrated. With a gate length of 2 mu m, a cut-off frequency of f(T) similar to 2.5 GHz and a maximum oscillation frequency of f(max) similar to 7.2 GHz were obtained without de-embedding. This corresponds to an extrinsic f(T).L-g of 5GHz.mu m, comparable to those reported for GFETs on other well-known flexible substrates. RF GFETs on the biointegrative MBC therefore show great promise for high-sensitivity and high-speed in vivo sensors and electronics applications.