• 文献标题:   Fabrication of Graphene-Based Micro Strain Gauges
  • 文献类型:   Article
  • 作  者:   TSAI JTH, LIN CH, LU CC
  • 作者关键词:   graphene, strain gauge, electrical resistivity, mechanical stres
  • 出版物名称:   NANOSCIENCE NANOTECHNOLOGY LETTERS
  • ISSN:   1941-4900 EI 1941-4919
  • 通讯作者地址:   Natl Taiwan Ocean Univ
  • 被引频次:   1
  • DOI:   10.1166/nnl.2014.1659
  • 出版年:   2014

▎ 摘  要

Fabrication of graphene-based strain gauges on flexible substrates is demonstrated. The strain gauge consists of a single layer mechanically exfoliated graphene sheet and metal electrodes on silicon and polycarbonate substrates. Conventional photolithography is used to fabricate the strain gauge in a two-terminal device structure. The device is characterized by electrical resistivity versus mechanical strain showing increasing resistance with bending force on substrates. High gauge factor is measured on our experimental graphene-based gauge. This promises a new class of strain gauge with high sensitivity. Our results open a new route to fabrication of a micro strain gauge with high performance, lower cost, and extraordinary functionality, with higher levels of integration with conventional microelectronic systems.