▎ 摘 要
Fabrication of graphene-based strain gauges on flexible substrates is demonstrated. The strain gauge consists of a single layer mechanically exfoliated graphene sheet and metal electrodes on silicon and polycarbonate substrates. Conventional photolithography is used to fabricate the strain gauge in a two-terminal device structure. The device is characterized by electrical resistivity versus mechanical strain showing increasing resistance with bending force on substrates. High gauge factor is measured on our experimental graphene-based gauge. This promises a new class of strain gauge with high sensitivity. Our results open a new route to fabrication of a micro strain gauge with high performance, lower cost, and extraordinary functionality, with higher levels of integration with conventional microelectronic systems.