• 文献标题:   Chemical vapor deposition of graphene on thin-metal films
  • 文献类型:   Review
  • 作  者:   XU SS, ZHANG LP, WANG B, RUOFF RS
  • 作者关键词:  
  • 出版物名称:   CELL REPORTS PHYSICAL SCIENCE
  • ISSN:  
  • 通讯作者地址:  
  • 被引频次:   37
  • DOI:   10.1016/j.xcrp.2021.100372 EA MAR 2021
  • 出版年:   2021

▎ 摘  要

Metal foils, particularly copper and copper-nickel alloy, are commonly used to grow large-area crystalline mono- or bi-layer graphene domains and films by chemical vapor deposition (CVD) methods. Thin-metal films, which are usually made by depositing metals on various substrates such as single-crystal sapphire, have also been reported as catalytic substrates for high-quality graphene growth. Thin-metal films can also serve as intermediates to grow graphene on catalytically inactive substrates, such as dielectrics for electronic devices. Focusing on the CVD growth of graphene on thin-metal films, we review the history of CVD graphene growth, the growth on different single-metals and alloy thin films, and the reported performance of such graphene in electronic devices. We also comment on current challenges and opportunities for the further development of this field.