▎ 摘　　要

A one-port surface acoustic wave (SAW) resonator mass sensor composed of multilayer graphene (MLG) electrodes was investigated by the finite element method (FEM) and analyses were carried out to study the enhancement of sensitivity and the secondary effects caused by MLG electrodes on the performance of the resonator. Unlike metal electrodes, MLG electrode offers elastic loading to the contact surface, as evidenced by the increase in the surface velocity of the SAW device. In terms of the sensitivity of the mass sensor, MLG electrode showed the largest center frequency shift in response to a change in mass loading, as well as when used as a gas sensor to detect volatile organic compounds (VOCs). Also, MLG electrodes offered the least triple transit signal (TTS) and bulk acoustic wave (BAW) generations compared with Al and Au-Cr electrodes. Thus, the one-port SAW resonator with graphene electrodes not only possesses excellent performance characteristics but also gives rise to new opportunities in the development of highly sensitive mass sensors. (C) 2017 The Japan Society of Applied Physics