▎ 摘　　要

Wear and adhesion properties of single-layer graphene deposited on a silicon wafer were investigated in this study. Wear characteristics was studied at nanoscale by using friction force microscopy (FFM) while adhesion property was measured at microscale with a scratch tester. The microscratch test was performed on a single-layer graphene by linearly increasing normal load from 0 to 200 mN. The Kelvin probe force microscopy (KPFM) was used to locally measure surface potential in the tested surface to quantitatively measure the area of damage of graphene layer. The nanoscale wear test results showed two stages of damage of graphene layer; a steady increase at low loads and a relatively rapid increase at high loads. The microscratch test results revealed that severe damage of the layer occurred without introduction of minor damage stage. We demonstrated that the KPFM was highly effective in quantifying the damage of graphene layer.