• 文献标题:   Realization of a high mobility dual-gated graphene field-effect transistor with Al2O3 dielectric
  • 文献类型:   Article
  • 作  者:   KIM S, NAH J, JO I, SHAHRJERDI D, COLOMBO L, YAO Z, TUTUC E, BANERJEE SK
  • 作者关键词:   alumina, graphene, insulated gate field effect transistor, semiconductor device model
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951
  • 通讯作者地址:   Univ Texas Austin
  • 被引频次:   606
  • DOI:   10.1063/1.3077021
  • 出版年:   2009

▎ 摘  要

We fabricate and characterize dual-gated graphene field-effect transistors using Al2O3 as top-gate dielectric. We use a thin Al film as a nucleation layer to enable the atomic layer deposition of Al2O3. Our devices show mobility values of over 8000 cm(2)/V s at room temperature, a finding which indicates that the top-gate stack does not significantly increase the carrier scattering and consequently degrade the device characteristics. We propose a device model to fit the experimental data using a single mobility value.