• 文献标题:   Reduction of metal-graphene contact resistance by direct growth of graphene over metal
  • 文献类型:   Article
  • 作  者:   HONG SK, SONG SM, SUL O, CHO BJ
  • 作者关键词:   graphene, contact resistance, chemical vapor deposition
  • 出版物名称:   CARBON LETTERS
  • ISSN:   1976-4251 EI 2233-4998
  • 通讯作者地址:   Korea Adv Inst Sci Technol
  • 被引频次:   3
  • DOI:   10.5714/CL.2013.14.3.171
  • 出版年:   2013

▎ 摘  要

The high quality contact between graphene and the metal electrode is a crucial factor in achieving the high performance of graphene transistors. However, there is not sufficient research about contact resistance reduction methods to improve the junction of metal-graphene. In this paper, we propose a new method to decrease the contact resistance between graphene and metal using directly grown graphene over a metal surface. The study found that the grown graphene over copper, as an intermediate layer between the copper and the transferred graphene, reduces contact resistance, and that the adhesion strength between graphene and metal becomes stronger. The results confirmed the contact resistance of the metal-graphene of the proposed structure is nearly half that of the conventional contact structure.