• 文献标题:   Controlling Defect and Dopant Concentrations in Graphene by Remote Plasma Treatments
  • 文献类型:   Article
  • 作  者:   MCMANUS JB, HENNESSY A, CULLEN CP, HALLAM T, MCEVOY N, DUESBERG GS
  • 作者关键词:   chemical vapour deposition, doping, graphene, nitrogen, plasma treatment, transistor
  • 出版物名称:   PHYSICA STATUS SOLIDI BBASIC SOLID STATE PHYSICS
  • ISSN:   0370-1972 EI 1521-3951
  • 通讯作者地址:   Trinity Coll Dublin
  • 被引频次:   5
  • DOI:   10.1002/pssb.201700214
  • 出版年:   2017

▎ 摘  要

This report details the controllable doping of graphene through post-growth plasma treatments. Defects are controllably introduced into the lattice using argon plasma, following this sample are exposed to ammonia/hydrogen plasma. During this nitrogen atoms get incorporated causing partial restoration of the graphene lattice. The damage levels are characterised by Raman and X-ray photoelectron spectroscopies. The incorporation of nitrogen into the graphene lattice provides significant n-doping. This is confirmed by the fabrication of graphene field-effect transistors which show clear n-type behaviour and mobilities not significantly less than those of pristine graphene. Thus this work demonstrates the viability of plasma treatments to reliably dope graphene.