• 文献标题:   Direct growth of graphene-dielectric bi-layer structure on device substrates from Si-based polymer
  • 文献类型:   Article
  • 作  者:   SEO HK, KIM K, MIN SY, LEE Y, PARK CE, RAJ R, LEE TW
  • 作者关键词:   graphene, solid carbon source, graphenedielectric bilayer, polydimethylsiloxane, organic fieldeffect transistor
  • 出版物名称:   2D MATERIALS
  • ISSN:   2053-1583
  • 通讯作者地址:   Seoul Natl Univ
  • 被引频次:   7
  • DOI:   10.1088/2053-1583/aa5408
  • 出版年:   2017

▎ 摘  要

To facilitate the utilization of graphene films in conventional semiconducting devices (e.g. transistors and memories) which includes an insulating layer such as gate dielectric, facile synthesis of bi-layers composed of a graphene film and an insulating layer by one-step thermal conversion will be very important. We demonstrate a simple, inexpensive, scalable and patternable process to synthesize graphene-dielectric bi-layer films from solution-processed polydimethylsiloxane (PDMS) under a Ni capping layer. This method fabricates graphene-dielectric bi-layer structure simultaneously directly on substrate by thermal conversion of PDMS without using additional graphene transfer and patterning process or formation of an expensive dielectric layer, which makes the device fabrication process much easier. The graphene-dielectric bi-layer on a conducting substrate was used in bottom-contact pentacene field-effect transistors that showed ohmic contact and small hysteresis. Our new method will provide a way to fabricate flexible electronic devices simply and inexpensively.