• 文献标题:   Methane dissociation process in inductively coupled Ar/H-2/CH4 plasma for graphene nano-flakes production
  • 文献类型:   Article
  • 作  者:   MOHANTA A, LANFANT B, ASFAHA M, LEPAROUX M
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   EMPA Swiss Fed Labs Mat Sci Technol
  • 被引频次:   8
  • DOI:   10.1063/1.4977568
  • 出版年:   2017

▎ 摘  要

The role of hydrogen and methane dissociation process in induction plasma synthesis of graphene nano-flakes (GNF) is studied by the optical emission spectroscopy of Ar/H-2/CH4 plasma. The condensation of C-2 species formed due to methane decomposition produces GNF, which depends on pressure. Electron impact and dehydrogenation processes dissociate methane, which promotes and hinders the GNF production, respectively. The effect of hydrogen is insignificant on quality, size and morphology of the GNF. The CH4 flow rate has no influence on particle temperature but has effect on cooling rate at the point of nucleation and, therefore, on production rate and thickness of GNF. Published by AIP Publishing.