• 文献标题:   Oxygen-Aided Synthesis of Polycrystalline Graphene on Silicon Dioxide Substrates
  • 文献类型:   Article
  • 作  者:   CHEN JY, WEN YG, GUO YL, WU B, HUANG LP, XUE YZ, GENG DC, WANG D, YU G, LIU YQ
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
  • ISSN:   0002-7863
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   209
  • DOI:   10.1021/ja2063633
  • 出版年:   2011

▎ 摘  要

We report the metal-catalyst-free synthesis of high-quality polycrystalline graphene on dielectric substrates [silicon dioxide (SiO(2)) or quartz] using an oxygen-aided chemical vapor deposition (CVD) process. The growth was carried out using a CVD system at atmospheric. pressure. After high-temperature activation of the growth substrates in air, high quality polycrystalline graphene is subsequently grown on SiO(2) by utilizing the oxygen-based nucleation sites. The growth mechanism is analogous to that of growth for single-walled carbon nanotubes. Graphene-modified SiO(2) substrates can be directly used in transparent conducting films and field-effect devices. The carrier mobilities are about 531 cm(2) V(-1) s(-1) in air and 472 cm(2) V(-1) s(-1) in N(2), which are dose to that of metal-catalyzed polycrystalline graphene. The method avoids the need for either a metal catalyst or a complicated and skilled postgrowth transfer process and is compatible with current silicon processing techniques.