• 文献标题:   All graphene electromechanical switch fabricated by chemical vapor deposition
  • 文献类型:   Article
  • 作  者:   MILANINIA KM, BALDO MA, REINA A, KONG J
  • 作者关键词:   chemical vapour deposition, electrical contact, graphene, nanoelectromechanical device, nanofabrication, switche, thin film
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951
  • 通讯作者地址:   MIT
  • 被引频次:   106
  • DOI:   10.1063/1.3259415
  • 出版年:   2009

▎ 摘  要

We demonstrate an electromechanical switch comprising two polycrystalline graphene films; each deposited using ambient pressure chemical vapor deposition. The top film is pulled into electrical contact with the bottom film by application of approximately 5 V between the layers. Contact is broken by mechanical restoring forces after bias is removed. The device switches several times before tearing. Demonstration of switching at low voltage confirms that graphene is an attractive material for electromechanical switches. Reliability may be improved by scaling the device area to within one crystalline domain of the graphene films.