▎ 摘　　要

Recently, the development of miniaturized electronic devices has accelerated the demand for the rate capability of planar on-chip micro-supercapacitors (POMSs). The POMSs based on reduced graphene oxide and carbon nanotube (rGO/CNT) composite electrodes (rGO/CNT-POMSs) were manufactured in the work and detailed electrochemical tests of devices were carried out over a wide range of scanning rates (0.01-10000 V s(-1)). The rGO/CNT composite electrode films without binder were prepared on silicon substrates by a modified liquid-air interface self-assembly method and a hydroiodic acid reduction method. The electrodes were fabricated into interdigital structure with 50 mu m width of electrode and gap of electrode by photolithography. Interdigital POMSs based on different electrodes were prepared by gold sputtering on the electrode lugs. The area capacitance of the rGO/CNT-POMSs was 28.62 mu F cm(-2). They also had 0.004 mu Wh cm(-2) of energy density and 1.068 mu W cm(-2) of power density. In addition, the charge-discharge time constant of the device was only 5.6 mu s, and the charge-discharge rate was very quick. After 10,000 cycles of charge-discharge, the capacitance retention rate was still above 88%. At the ultra-high scan rate of 10000 V s(-1), the devices still worked well. Compared with the POMSs based on reduced graphene oxide electrodes (rGO-POMSs) and the POMSs based on carbon nanotube electrodes (CNT-POMSs), the introduction of the CNT significantly increased the area capacitance, energy density and power density of rGO/CNT-POMSs, and significantly shortened the charge-discharge time constant. This indicated that the rGO/CNT composite electrodes had a good application prospect in the micro-chip accumulator devices.