• 文献标题:   Robust graphene wet transfer process through low molecular weight polymethylmethacrylate
  • 文献类型:   Article
  • 作  者:   KIM S, SHIN S, KIM T, DU H, SONG M, LEE C, KIM K, CHO S, SEO DH, SEO S
  • 作者关键词:  
  • 出版物名称:   CARBON
  • ISSN:   0008-6223 EI 1873-3891
  • 通讯作者地址:   Sejong Univ
  • 被引频次:   19
  • DOI:   10.1016/j.carbon.2015.11.027
  • 出版年:   2016

▎ 摘  要

Poly (methyl methacrylate) (PMMA) is commonly used during the transfer process of chemical vapor deposited (CVD) graphene. Since PMMA on graphene surfaces is removed by breaking polymerization backbone bonds (de-polymerization), using shorter polymer chains can be a self-solving method for PMMA residue removal. We report on graphene properties transferred with different average molecular weight poly (methyl methacrylate) (PMMA). We obtained enhanced field effect mobility and reduced hole doping without post-annealing for lower average molecular weight PMMA. Also, the graphene surfaces transferred by lower average molecular weight PMMA was free of polymer debris with clean morphology, which was confirmed by carbon 1s X-ray photoemission spectroscopy. This graphene transfer process can be used to avoid additional thermal budget which can cause degradation of device performance. (C) 2015 Elsevier Ltd. All rights reserved.