• 文献标题:   The crystal orientation relation and macroscopic surface roughness in heteroepitaxial graphene grown on Cu/mica
  • 文献类型:   Article
  • 作  者:   QI JL, NAGASHIO K, NISHIMURA T, TORIUMI A
  • 作者关键词:   graphene, cvd, transistor
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:   Harbin Inst Technol
  • 被引频次:   8
  • DOI:   10.1088/0957-4484/25/18/185602
  • 出版年:   2014

▎ 摘  要

Clean, flat and orientation-identified graphene on a substrate is in high demand for graphene electronics. In this study, the hetero-epitaxial graphene growth on Cu(111)/mica(001) by chemical vapor deposition is investigated to check the applicability for top-gate insulator research on graphene, as well as graphene channel research, by transferring graphene on to SiO2/Si substrates. After adjusting the graphene growth conditions, the surface roughness of the graphene/Cu/mica substrate and the average smoothed areas are similar to 0.34 nm and similar to 100 mu m(2), respectively. The orientation of graphene in the graphene/Cu/mica substrate can be identified by the hexagonal void morphology of Cu. Moreover, we demonstrate a relatively high mobility of similar to 4500 cm(2) V- 1 s(- 1) in graphene transferred on the SiO2/Si substrate. These results suggest that the present graphene/Cu/mica substrate can be used for top-gate insulator research on graphene.