• 文献标题:   Sputtering an exterior metal coating on copper enclosure for large-scale growth of single-crystalline graphene
  • 文献类型:   Article
  • 作  者:   LUO BR, CARIDAD JM, WHELAN PR, THOMSEN JD, MACKENZIE DMA, CABO AG, MAHATHA SK, BIANCHI M, HOFMANN P, JEPSEN PU, BOGGILD P, BOOTH TJ
  • 作者关键词:   graphene, chemical vapor deposition, copper enclosure, sputter, singlecrystal
  • 出版物名称:   2D MATERIALS
  • ISSN:   2053-1583
  • 通讯作者地址:   Tech Univ Denmark
  • 被引频次:   8
  • DOI:   10.1088/2053-1583/aa85d5
  • 出版年:   2017

▎ 摘  要

We show the suppression of nucleation density in chemical vapor deposited graphene through the use of a sputtered metal coating on the exterior of a copper catalyst enclosure, resulting in the growth of sub-centimeter scale single crystal graphene domains and complete elimination of multilayer growth. The sputtered coating suppresses nucleation density by acting as both a diffusion barrier and as a sink for excess carbon during the growth, reducing the carbon concentration in the interior of the enclosure. Field effect mobility of hBN-templated devices fabricated from graphene domains grown in this way show room temperature carrier mobilities of 12 000 cm(2) V-1 s(-1) and an absence of weak localization at low temperature. These results indicate a very low concentration of line and point defects in the grown films, which is further supported by Raman and transmission electron microscopic characterization.