▎ 摘　　要

This paper presents three-dimensional (3D) micro supercapacitors with thick interdigital electrodes supported and separated by SU-8. Nanoporous carbon materials including graphene and activated carbon (AC) are used as active materials in self-supporting composites to build the electrodes. The SU-8 separators provide mechanical support for thick electrodes and allow a considerable amount of material to be loaded in a limited footprint area. The prototypes have been accomplished by a simple microelectromechanical systems (MEMS) fabrication process and sealed by polydimethylsiloxane (PDMS) caps with ionic liquid electrolytes injected into the electrode area. Electrochemical tests demonstrate that the graphene-based prototype with 100 mu m thick electrodes shows good power performance and provides a considerable specific capacitance of about 60 mF cm(-2). Two AC-based prototypes show larger capacitance of 160 mF cm(-2) and 311 mF cm(-2) with 100 mu m and 200 mu m thick electrodes respectively, because of higher volume density of the material. The results demonstrate that both thick 3D electrode structure and volume capacitance of the electrode material are key factors for high-performance micro supercapacitors, which can be potentially used in specific applications such as power suppliers and storage components for harvesters.