• 文献标题:   MOVPE growth of semipolar III-nitride semiconductors on CVD graphene
  • 文献类型:   Article
  • 作  者:   GUPTA P, RAHMAN AA, HATUI N, GOKHALE MR, DESHMUKH MM, BHATTACHARYA A
  • 作者关键词:   low pressure metalorganic vapor phase epitaxy, graphene, nitride, semiconducting iiiv material
  • 出版物名称:   JOURNAL OF CRYSTAL GROWTH
  • ISSN:   0022-0248 EI 1873-5002
  • 通讯作者地址:   Tata Inst Fundamental Res
  • 被引频次:   48
  • DOI:   10.1016/j.jcrysgro.2013.03.020
  • 出版年:   2013

▎ 摘  要

We report the growth and characterization of group III-nitride semiconductor layers on graphene grown by chemical vapour deposition. GaN, AlGaN alloys, and InN layers are grown using an AlN nucleation and a buffer layer. We investigate the effect of varying growth temperature and V/III ratio and show that under optimized growth conditions preferentially semipolar (10 (1) over bar1) oriented nitride layers can be obtained. These layers, though polycrystalline, are highly oriented and show strong room temperature photoluminescence, thus showing graphene to be a novel substrate for the growth of III-nitride materials. (C) 2013 Elsevier B.V. All rights reserved.