▎ 摘 要
In this work, a novel micro-pressure graphene sensor array with double-layer mesh structure is designed in order to effectively realize the multi-point measurement of micro-pressure. A 4 x 4 sensor array could form 16 pressure-sensing pixels with good multi-point measurement capability. The double-layer mesh graphene with interconnected porous microstructure is fabricated with a cheap and convenient laser direct writing (LDW) technique. Based on the excellent microstructure and the double-layer mesh structure, this graphene pressure sensor array demonstrates high sensitivity in the low-pressure range (0.339 kPa(-1), < 200 Pa), ultra-fast response time (< 30 ms), and prominent repeatability (>200 cycles), which meets the requirements of micro-pressure measurement. In addition, a full-automatic micro-pressure demodulation system equipped with human-computer interaction interface is designed to realize the two-dimensional shape recognition. Therefore, it could open broad applications in the fields of micro-pressure measurement, two-dimensional shape recognition and wearable electronic devices.