• 文献标题:   A Resonant Graphene NEMS Vibrometer
  • 文献类型:   Article
  • 作  者:   MORENOGARCIA D, FAN XG, SMITH AD, LEMME MC, MESSINA V, MARTINOLMOS C, NIKLAUS F, VILLANUEVA LG
  • 作者关键词:   graphene, laser doppler vibrometry, nanoelectromechanical nems, resonator, vibration
  • 出版物名称:   SMALL
  • ISSN:   1613-6810 EI 1613-6829
  • 通讯作者地址:  
  • 被引频次:   2
  • DOI:   10.1002/smll.202201816 EA MAY 2022
  • 出版年:   2022

▎ 摘  要

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.