• 文献标题:   A Highly Sensitive Flexible Pressure Sensor Based on Inter-Comb Structured Graphene Electrodes
  • 文献类型:   Article, Early Access
  • 作  者:   LU SL, NIE TC, LI Y, LI YY, YAO Z, KIM NY, LI SD
  • 作者关键词:   electrode, sensor, sensitivity, pressure sensor, capacitance, graphene, temperature sensor, capacitive pressure sensor, graphene electrode, high sensitivity, intercomb structure, laser scribe
  • 出版物名称:   IEEE TRANSACTIONS ON ELECTRON DEVICES
  • ISSN:   0018-9383 EI 1557-9646
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1109/TED.2023.3248000 EA FEB 2023
  • 出版年:   2023

▎ 摘  要

Susceptible and flexible pressure sensors have broad application prospects and market demands in bionic skin, human-machine interface, and intelligent wearable electronic devices. However, optimizing the sensor's sensitivity through a simple, low-cost process is still a considerable challenge. In this work, the sensitivity of a capacitive pressure sensor was effectively improved by optimizing the geometry of the laser-scribed graphene (LSG) electrodes. The pressure sensor, based on the inter-comb structured LSG electrodes and polyvinyl pyrrolidone nanofiber membrane (PVP NM) dielectric layer, has a high sensitivity (4.352 kPa(-1) at 0-2 kPa), a fast response/recovery time (40/37 ms), an ultralow detection limit (similar to 12 Pa), and excellent mechanical stability (6000 cycles). The sensor developed in this research can be used in health monitoring such as carotid artery pulsation and respiratory disease. In addition, the 6 x 6 sensor array can precisely characterize the regional pressure distribution. This study demonstrates the significant potential of the inter-comb structured LSG electrodes in highly sensitive flexible pressure sensors.