▎ 摘　　要

Graphene based multi-valued nanoelectromechanical switches are suggested and demonstrated. The device structure having multiple contact sites with different heights under the doubly clamped suspended beam provides multiple contacts to be formed sequentially from the taller electrode to the shorter electrode, which results in multiple logic states. Based on the finite element method simulation, we found that our device characteristics, such as turn-on and threshold voltages, are highly governed by the device design. The proof-of-concept device realized by using a newly developed 3D fabrication method based on the e-beam lithography expresses quaternary logic states successfully with a high stability in repetitive operations.