▎ 摘　　要

A COMSOL model of interdigital capacitive humidity sensor based on graphene oxide (GO) as sensing material is presented. The diffusion process of water molecules and the effects on the capacitance value are demonstrated in theory. The capacitance value of the model is shown in simulation under different relative humidity, and also the influences of structural parameters are summarized, which can be used to construct electrode structure for increasing the sensitivity of humidity sensor. Furthermore, response time of the module is tested through dynamic process simulations, the results show more advanced performance compared with another module. The process of argumentation suggests that this model can also be used for the optimization of other gases capacitive sensors. (C) 2015 Elsevier B.V. All rights reserved.