• 文献标题:   Facile Dry Surface Cleaning of Graphene by UV Treatment
  • 文献类型:   Article
  • 作  者:   KIM JH, HAIDARI MM, CHOI JS, KIM H, YU YJ, PARK J
  • 作者关键词:   chemical vapor deposition cvd, graphene, pmma residue, ultraviolet uv, surface cleaning
  • 出版物名称:   JOURNAL OF THE KOREAN PHYSICAL SOCIETY
  • ISSN:   0374-4884 EI 1976-8524
  • 通讯作者地址:   Konkuk Univ
  • 被引频次:   1
  • DOI:   10.3938/jkps.72.1045
  • 出版年:   2018

▎ 摘  要

Graphene has been considered an ideal material for application in transparent lightweight wear-able electronics due to its extraordinary mechanical, optical, and electrical properties originating from its ordered hexagonal carbon atomic lattice in a layer. Precise surface control is critical in maximizing its performance in electronic applications. Graphene grown by chemical vapor deposition is widely used but it produces polymeric residue following wet/chemical transfer process, which strongly affects its intrinsic electrical properties and limits the doping efficiency by adsorption. Here, we introduce a facile dry-cleaning method based on UV irradiation to eliminate the organic residues even after device fabrication. Through surface topography, Raman analysis, and electrical transport measurement characteristics, we confirm that the optimized UV treatment can recover the clean graphene surface and improve graphene-FET performance more effectively than thermal treatment. We propose our UV irradiation method as a systematically controllable and damage-free post process for application in large-area devices.