• 文献标题:   The Fabrication of Wrinkle-Free Graphene Patterns on Ge(110) Substrate
  • 文献类型:   Article
  • 作  者:   WANG TB, LI PL, GAO M, WANG YL, DI ZF, XUE ZY, ZHANG M
  • 作者关键词:   graphene pattern, ion implantation, strain engineering, wrinklefree graphene
  • 出版物名称:   PHYSICA STATUS SOLIDI BBASIC SOLID STATE PHYSICS
  • ISSN:   0370-1972 EI 1521-3951
  • 通讯作者地址:  
  • 被引频次:   2
  • DOI:   10.1002/pssb.202000560 EA FEB 2021
  • 出版年:   2021

▎ 摘  要

A thermal expansion mismatch is inevitable for graphene grown on various substrates by chemical vapor deposition, which leads to the formation of wrinkles during post-growth cooling. Wrinkles can degrade the superior properties of graphene and increase device-to-device inconsistency. To address this issue, wrinkle-free graphene patterns are grown on Ge(110) substrate with the assistance of 5 x 10(16) cm(-2) Si ion implantation. The experimental data show that the wrinkle-free graphene can grow on unimplanted areas, whereas no graphene is synthesized on Si ion implanted areas. Further research shows that the wrinkle-free nature of graphene is closely related to the compressive strain distribution in graphene. The compressive strain in graphene is increased to a significant extent with an increase in the size of graphene patterns. When the compressive strain energy exceeds the wrinkle-formation barrier, wrinkles emerge on the graphene, and the compressive strain decreases as a consequence. This research may help to understand the formation mechanisms of graphene wrinkles and promote the growth of wrinkle-free graphene.