• 文献标题:   A graphene field-effect device
  • 文献类型:   Article
  • 作  者:   LEMME MC, ECHTERMEYER TJ, BAUS M, KURZ H
  • 作者关键词:   field effect, graphene, mobility, mosfet, transistor
  • 出版物名称:   IEEE ELECTRON DEVICE LETTERS
  • ISSN:   0741-3106
  • 通讯作者地址:   AMO GmbH
  • 被引频次:   681
  • DOI:   10.1109/LED.2007.891668
  • 出版年:   2007

▎ 摘  要

In this letter, a top-gated field-effect device (FED) manufactured from monolayer graphene is investigated. Except for graphene deposition, a conventional top-down CMOS-compatible process flow is applied. Carrier mobilities in graphene pseudo-MOS structures are compared to those obtained from the top-gated Graphene-FEDs. The extracted values exceed the universal mobility of silicon and silicon-on-insulator MOSFETs.