• 文献标题:   Effective Cleaning of Hexagonal Boron Nitride for Graphene Devices
  • 文献类型:   Article
  • 作  者:   GARCIA AGF, NEUMANN M, AMET F, WILLIAMS JR, WATANABE K, TANIGUCHI T, GOLDHABERGORDON D
  • 作者关键词:   boron nitride, raman, organic residue removal, graphene
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:   Stanford Univ
  • 被引频次:   67
  • DOI:   10.1021/nl3011726
  • 出版年:   2012

▎ 摘  要

Hexagonal boron nitride (h-BN) films have attracted, considerable interest as substrates for graphene. (Dean, C. R et al. Nat. Nanotechnol. 2010, 5, 722-6; Wang, H. et al. Electron Device Lett. 2011, 32, 1209-1211; Sanchez-Yamagishi, J. et al. Phys. Rev. Lett, 2012, 108, 1-5.) We study the presence of organic contaminants introduced by standard lithography and substrate transfer processing on h-BN films exfoliated on silicon oxide substrates. Exposure to photoresist processing adds a large broad luminescence peak to the Raman spectrum of the h-BN flake. This signal persists through typical furnace annealing recipes (Ar/H-2). A recipe that successfully removes organic contaminants and results in clean h-BN flakes involves treatment in Ar/O-2 at 500 degrees C.