• 文献标题:   Cleaning graphene using atomic force microscope
  • 文献类型:   Article
  • 作  者:   LINDVALL N, KALABUKHOV A, YURGENS A
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF APPLIED PHYSICS
  • ISSN:   0021-8979 EI 1089-7550
  • 通讯作者地址:   Chalmers
  • 被引频次:   29
  • DOI:   10.1063/1.3695451
  • 出版年:   2012

▎ 摘  要

We mechanically clean graphene devices using an atomic force microscope (AFM). By scanning an AFM tip in contact mode in a broom-like way over the sample, resist residues are pushed away from the desired area. We obtain atomically flat graphene with a root mean square (rms) roughness as low as 0.12 nm after this procedure. The cleaning also results in a shift of the charge-neutrality point toward zero gate voltage, as well as an increase in charge carrier mobility. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3695451]