• 文献标题:   Mobility improvement in CVD graphene by using local metal side-gate
  • 文献类型:   Article
  • 作  者:   ACHARYA S, BABU AV, KHADAR RA, KOTTANTHARAYIL A
  • 作者关键词:   graphene transistor, mobility, tcad simulation
  • 出版物名称:   SEMICONDUCTOR SCIENCE TECHNOLOGY
  • ISSN:   0268-1242 EI 1361-6641
  • 通讯作者地址:   Indian Inst Technol
  • 被引频次:   0
  • DOI:   10.1088/1361-6641/ab78f4
  • 出版年:   2020

▎ 摘  要

It has been anticipated that using a side-gate helps in the improvement of mobility over more common top-gate or back-gate graphene transistors. In this work, we presented a method of quantifying the mobility improvement. Transistors are fabricated using chemical vapour deposition graphene on SiO2/Si substrate. Characteristics of two graphene transistors with slightly different geometry are presented. The transistors are fabricated with both, a back-gate and a side-gate. Using results from experiment and technology computer-aided design simulations, field effect mobility of majority carriers (holes) is calculated by two methods. It has been observed that switching from back-gate to side-gate operation on the same transistor results in a mobility improvement of at least 1.64 times. Simulation results presented in this work exhibit a non-perpendicular direction of majority side-gate electric field induced to the two-dimensional graphene channel. This could be one of the reasons behind the mobility improvement. Because in both cases (back-gate and side-gate) the graphene channel is in contact with ambient air on top and SiO2 substrate on bottom.