▎ 摘 要
This paper proposes a signal processed systematic 3 x 3 humidity sensor array with all range and highly linear humidity response based on different particles size composite inks and different interspaces of interdigital electrodes (IDEs). The fabricated sensors are patterned through a commercial inkjet printer and the composite of Methylene Blue and Graphene with three different particle sizes of bulk Graphene Flakes (BGF), Graphene Flakes (GF), and Graphene Quantum Dots (GQD), which are employed as an active layer using spin coating technique on three types of IDEs with different interspaces of 300, 200, and 100 mu m. All range linear function (0-100% RH) is achieved by applying the linear combination method of nine sensors in the signal processing field, where weights for linear combination are required, which are estimated by the least square solution. The humidity sensing array shows a fast response time (T-res) of 0.2 s and recovery time (T-rec) of 0.4 s. From the results, the proposed humidity sensor array opens a new gateway for a wide range of humidity sensing applications with a linear function.