▎ 摘　　要

In the present study, graphite-like +Ni/SiO2/Si wafer specimens were prepared using a co-sputtering system. Then, indium gallium zinc oxide (IGZO) films were deposited onto the graphite-like +Ni/SiO2/Si wafer specimens at deposition powers of 60, 80, and 100 W, respectively. The effects of IGZO deposition power on the specimen's microstructure and the vacancy defects in the graphite-like +Ni layer are evaluated in terms of the electrical and mechanical properties of the as-prepared specimens. The effects of the graphite-like +Ni film on the electrical resistance of the IGZO film with microcracks is evaluated using a tribotester. The quantity and mean size of microcracks and variations of electrical resistance of the IGZO/graphite-like +Ni/SiO2/Si wafer specimens with time are used to evaluate the role of the graphite-like +Ni layer as an alternate conductor of electric current when the IGZO film is degraded by microcracks. The growth of hillocks in the graphite-like +Ni layer can be enhanced by increasing the IGZO deposition power. These hillocks cause the graphite-like +Ni layer to be convex and have an uneven film thickness, and lead to vacancy defects in the graphite-like film. The O atoms of IGZO were incorporated into graphene in the graphite-like layer as substitutional impurities. The effects of these impurities on the electrical structure with a characteristic of superconductors occur intermittently in the tribotests, resulting in a sharp reduction in the electrical resistance of a specimen. An increase in the intensity ratio, IRO2, related to oxygen vacancies, increases the peak intensities (PIs) of elemental Ga and the Ga-O bond, and decreases that of the Ga-Ga bond. In the IGZO/Glass specimens, a small reduction of the average transmittance is created in the specimens prepared by increasing the deposition power from 60 W to 100 W. The behavior of reflection is exactly opposite to that of transmittance. An increase in deposition power is favorable for the rise of optical band gap (E-g). Increasing the concentration of Zn2p(3/2) or Zn2p(1/2) increases PIGreen in photoluminescence profiles. Reductions in either In atoms or C-C and C-O bonds increase PIOrange. PIRed and can be increased by either increasing PIGa-Ga or decreasing the values of PIGa2p3/2, PIGa2p1/2, and PIGa-O. (C) 2016 Optical Society of America