• 文献标题:   Hexagonal boron nitride assisted growth of stoichiometric Al2O3 dielectric on graphene for triboelectric nanogenerators
  • 文献类型:   Article
  • 作  者:   HAN SA, LEE KH, KIM TH, SEUNG W, LEE SK, CHOI S, KUMAR B, BHATIA R, SHIN HJ, LEE WJ, KIM S, KIM HS, CHOI JY, KIM SW
  • 作者关键词:   hexagonal boron nitride nanosheet, graphene, atomic layer deposition, dielectric al2o3, triboelectric nanogenerator
  • 出版物名称:   NANO ENERGY
  • ISSN:   2211-2855 EI 2211-3282
  • 通讯作者地址:   Sungkyunkwan Univ
  • 被引频次:   16
  • DOI:   10.1016/j.nanoen.2015.01.030
  • 出版年:   2015

▎ 摘  要

Here we demonstrate the deposition of a high-k dielectric material on graphene using hexagonal boron nitride (h-BN) nanosheets as a buffer layer. The presence of an h-BN layer on top of the graphene facilitated the growth of high-quality Al2O3 by atomic layer deposition (ALD). Simulation results also support the experimental observations and provide an explanation for the suitability of h-BN as a buffer layer in terms of mixed ionic-covalent B-N bonding. Additionally, h-BN works as a protective shield to prevent graphene oxidation during ALD of Al2O3 for the fabrication of graphene-based devices. Finally, triboelectric nanogenerators (TNGs) based on both Al2O3/h-BN/graphene and Al2O3/graphene structures are demonstrated for further confirming the importance of h-BN for synthesizing high-quality Al2O3 on graphene. It was found that the Al2O3/h-BN/graphene-based TNG reveals meaningful electric power generation under a mechanical friction, while no significant electric power output from the Al2O3/graphene-based TNG is obtained, indicating high charge storage capacity of the dielectric Al2O3 layer on h-BN. (C) 2015 Elsevier Ltd. All rights reserved.