• 文献标题:   Multi-scale graphene patterns on arbitrary substrates via laser-assisted transfer-printing process
  • 文献类型:   Article
  • 作  者:   PARK JB, YOO JH, GRIGOROPOULOS CP
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Univ Calif Berkeley
  • 被引频次:   14
  • DOI:   10.1063/1.4738883
  • 出版年:   2012

▎ 摘  要

A laser-assisted transfer-printing process is developed for multi-scale graphene patterns on arbitrary substrates using femtosecond laser scanning on a graphene/metal substrate and transfer techniques without using multi-step patterning processes. The short pulse nature of a femtosecond laser on a graphene/copper sheet enables fabrication of high-resolution graphene patterns. Thanks to the scale up, fast, direct writing, multi-scale with high resolution, and reliable process characteristics, it can be an alternative pathway to the multi-step photolithography methods for printing arbitrary graphene patterns on desired substrates. We also demonstrate transparent strain devices without expensive photomasks and multi-step patterning process. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4738883]