• 文献标题:   Effects of methane flux on structural and transport properties of CVD-grown graphene films
  • 文献类型:   Article, Proceedings Paper
  • 作  者:   WANG ZG, CHEN YF, LI PJ, HAO X, FU Y, CHEN K, HUANG LX, LIU D
  • 作者关键词:   graphene, methane flux, chemical vapor deposition
  • 出版物名称:   VACUUM
  • ISSN:   0042-207X
  • 通讯作者地址:   Univ Elect Sci Technol China
  • 被引频次:   24
  • DOI:   10.1016/j.vacuum.2011.05.011
  • 出版年:   2012

▎ 摘  要

Large area, single-layer graphene films were synthesized on copper foils by chemical vapor deposition. We have investigated the effects of methane flux on structural and transport properties of graphene. Raman spectra and electrical results reveal that methane flux has almost no influence on the thickness of graphene, but clearly influences the structural defects of graphene. In addition, graphene field effect transistors with a gate length of 10 mu m were fabricated, exhibiting obvious field effects and p-type characteristics. (C) 2011 Elsevier Ltd. All rights reserved.