• 文献标题:   Electron beam nanosculpting of suspended graphene sheets
  • 文献类型:   Article
  • 作  者:   FISCHBEIN MD, DRNDIC M
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Univ Penn
  • 被引频次:   357
  • DOI:   10.1063/1.2980518
  • 出版年:   2008

▎ 摘  要

We demonstrate high-resolution modification of suspended multilayer graphene sheets by controlled exposure to the focused electron beam of a transmission electron microscope. We show that this technique can be used to realize, on time scales of a few seconds, a variety of features, including nanometer-scale pores, slits, and gaps that are stable and do not evolve over time. Despite the extreme thinness of the suspended graphene sheets, extensive removal of material to produce the desired feature geometries is found not to introduce long-range distortion of the suspended sheet structure. (C) 2008 American Institute of Physics.