• 文献标题:   Improvements on thermal stability of graphene and top gate graphene transistors by Ar annealing
  • 文献类型:   Article
  • 作  者:   LIU B, CHIU IS, LAI CS
  • 作者关键词:   graphene, thermal stability, raman spectrum, graphene transistor, high mobility, low defect
  • 出版物名称:   VACUUM
  • ISSN:   0042-207X
  • 通讯作者地址:   Chang Gung Univ
  • 被引频次:   5
  • DOI:   10.1016/j.vacuum.2016.11.022
  • 出版年:   2017

▎ 摘  要

Thermal annealing of graphene Was studied to improve the thermal stability. During the annealing under an Ar atmosphere with temperature from 100 degrees C to 600 degrees C, graphene exhibits partial removal of PMMA residues, low density of defect cracks in SEM images and relatively low I-D/I-G ratios in Raman spectrum probing. For a top-gated graphene transistor with thermal annealing, it performs high carrier mobility up to 3500 cm(2) V-1 s(-1) and slightly asymmetric bipolar behaviours as well as slight Dirac point variation within +/- 0.2 V. (C) 2016 Elsevier Ltd. All rights reserved.