▎ 摘 要
An ultra-high sensitivity, multi-parameter monitoring system was established based on a 1.8 mm(3), high-temperature-reduced graphene oxide microcavity. The gas refractive index, pressure, velocity and flux can be detected in real time based on polarization-sensitive absorption of graphene, and the detection limits are 1.1 x 10(-8) RIU (refractive index units), 3.5 Pa, 3.5 mm/s, and 0.1 ml/min respectively, with an experimental response time less than 0.5 s. These results are a great improvement over those measured previously with single-parameter sensors. Furthermore, the system can also recognize gas flow direction accurately, and enable applications for extreme conditions and for precision instruments with microcavity integrated. (C) 2016 Elsevier B.V. All rights reserved.