• 文献标题:   Process parameters of large single crystal graphene prepared by chemical vapor deposition
  • 文献类型:   Article
  • 作  者:   HAN LZ, ZHAO ZX, MA ZQ
  • 作者关键词:   graphene, chemical vapor deposition, process parameter, large dimension
  • 出版物名称:   ACTA PHYSICA SINICA
  • ISSN:   1000-3290
  • 通讯作者地址:   Shanghai Univ
  • 被引频次:   2
  • DOI:   10.7498/aps.63.248103
  • 出版年:   2014

▎ 摘  要

Graphene, as a two-dimensional sp(2) hybridization allotropicity of carbon element, possesses unique properties of electricity, photology, thermology and mechanics. For industrialization, graphene possessing large dimension and homogeneous property is required. It can be prepared by chemical vapor deposition technology. In this paper, based on the progress of graphene research this year, we summarize the influence factors of graphene preparation, including substrate selection and preprocessing, carbon source and assist gas flow control, chamber temperature, pressure control, cooling rate, and deposition time setting, etc. Finally, we outlook the research direction of preparing the large-dimensional and single crystal graphenes.