▎ 摘　　要

At present, there are more than 20 graphene detection technologies, but large-scale, low-cost, high-quality technologies have not yet achieved significant results, so it is difficult to meet the needs of industrial production. Material dispersion techniques and techniques combined with subsequent process and engineering applications also limit the industrialization process. The purpose of this paper is to study the non-destructive testing of graphene by near-field microwave microscopy, study the basic principle of near-field scanning microwave microscopy, and establish a system to effectively measure the electromagnetic properties of graphene film materials. In this experiment, when the probe of the near-field scanning microwave microscope approaches the sample, the Q factor or resonance frequency of the detection cavity is shifted, and then obtains physical quantities such as dielectric constant and conductivity. Non-destructively characterizing the material properties of the graphene film by a non-contact method ,then records the experimental process and analyzes the experimental data. The experimental results show that the quality factor has a significant relationship with the reduction temperature of graphene. Graphene samples reduced at other temperatures have a high dielectric constant and still exhibit strong dielectric properties. The experimental results show that the change of flame temperature is proportional to the content of graphene functional groups, and the oxygen-containing functional groups in graphene obtained at different temperatures are almost completely removed. With the rapid development of industrial technology, near-field microwave microscopy is considered to play an increasingly important role in improving product quality, simplifying production procedures and extending product life in graphene non-destructive testing.