▎ 摘　　要

We present few-layer graphene synthesis by negative carbon cluster ion implantation with C-1, C-2, and C-4 at energies below 20 keV. The small C-clusters were produced by a source of negative ion by cesium sputtering with medium beam current. We show that the nonlinear effect in cluster-induced damage is favorable for graphene precipitation compared with monomer carbon ions. The nonlinear damage effect in cluster ion implantation shows positive impact on disorder reduction, film uniformity, and the surface smoothness in graphene synthesis. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4732088]