• 文献标题:   Graphene field effect transistors using TiO2 as the dielectric layer
  • 文献类型:   Article
  • 作  者:   FLORESSILVA PA, BORJAHERNANDEZ C, MAGANA C, ACOSTA DR, BOTELLOMENDEZ AR, SERKOVICLOLI LN
  • 作者关键词:   graphene, field effect transistor, tio2
  • 出版物名称:   PHYSICA ELOWDIMENSIONAL SYSTEMS NANOSTRUCTURES
  • ISSN:   1386-9477 EI 1873-1759
  • 通讯作者地址:   Ctr Atom Bariloche
  • 被引频次:   0
  • DOI:   10.1016/j.physe.2020.114282
  • 出版年:   2020

▎ 摘  要

In this work, we report the electron mobility and electron density of three graphene field effect transistors using a 280 nm titanium dioxide dielectric layer and a graphene channel of area 300 x 300 mu m(2). We achieve electron mobilities up to 1877 cm(2)/V and the Dirac point appears in small gate voltages, as compared to similar SiO2 transistors. Also, we obtain the TiO2 surface roughness through profilometry and confirm that electron mobility is inversely proportional to the channel's surface roughness.