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  • 文献标题:   Systematic Characterization of Graphene ESD Interconnects for On-Chip ESD Protection
  • 文献类型:   Article
  • 作　　者:   CHEN Q, MA R, ZHANG W, LU F, WANG CK, LIANG OW, ZHANG FL, LI C, TANG H, XIE YH, WANG A
  • 作者关键词:   electrostatic discharge esd protection, graphene ribbon gr, interconnect, transmission line pulsing tlp, very fast tlp vftlp
  • 出版物名称:   IEEE TRANSACTIONS ON ELECTRON DEVICES
  • ISSN:   0018-9383 EI 1557-9646
  • 通讯作者地址:   Univ Calif Riverside
  • 被引频次:   12
  • DOI:   10.1109/TED.2016.2582140
  • 出版年:   2016

▎ 摘　　要

We report systematic transient characterization of a graphene ribbon (GR) used as an interconnect for electrostatic discharge (ESD) protection of future integrated circuits. A large set of GR wires (around 6000) with varying and practical dimensions were fabricated using the chemical vapor deposition method and characterized by transmission line pulsing (TLP) and very fast TLP (VFTLP) measurements. Comprehensive TLP and VFTLP testing with varying pulse rise time (t(r)) and duration (t(d)) was performed across a wide temperature range (T = 30/-1-110 degrees C). Measurement -based statistics reveal the relationship between ESD capability of GR wires and the wire length (L), width (W), and number of graphene layers, as well as ESD pulse shapes and operation temperature.