• 文献标题:   Effect of High-kappa Dielectric Layer on 1/f Noise Behavior in Graphene Field-Effect Transistors
  • 文献类型:   Article
  • 作  者:   WANG YF, HO VX, HENSCHEL ZN, COONEY MP, VINH NQ
  • 作者关键词:   graphene, fieldeffect transistor, flicker noise, 1/f noise, highkappa dielectric thin film, atomic layer deposition
  • 出版物名称:   ACS APPLIED NANO MATERIALS
  • ISSN:  
  • 通讯作者地址:  
  • 被引频次:   11
  • DOI:   10.1021/acsanm.1c00154 EA MAR 2021
  • 出版年:   2021

▎ 摘  要

We report the 1/f noise characteristics at low frequency in graphene field-effect transistors that utilized a high-kappa dielectric tantalum oxide encapsulated layer (a few nanometer thick) placed by atomic layer deposition on Si3N4. A low noise level of similar to 2.2 x 10(-10) Hz(-1) has been obtained at f = 10 Hz. The origin and physical mechanism of the noise can be interpreted by the McWhorter context, where fluctuations in the carrier number contribute dominantly to the low-frequency noise. Optimizing fabrication processes reduced the number of charged impurities in the graphene field-effect transistors. The study has provided insights into the underlying physical mechanisms of the noise at low frequency for reducing the noise in graphene-based devices.