• 文献标题:   Preparation and characterization of the graphene-Cu composite film by electrodeposition process
  • 文献类型:   Article
  • 作  者:   HUANG G, WANG H, CHENG P, WANG HY, SUN B, SUN S, ZHANG CC, CHEN MM, DING GF
  • 作者关键词:   graphenecu composite film, electrodeposition, performance, micromachining technology
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Shanghai Jiao Tong Univ
  • 被引频次:   13
  • DOI:   10.1016/j.mee.2016.02.006
  • 出版年:   2016

▎ 摘  要

Graphene has a high thermal conductivity, electrical conductivity and outstanding mechanical properties,which is considered as the good reinforcement material in the composites. In the reported literatures, graphene oxide was generally used as the precursor of reinforcement to electrodeposit the composite film, then followed by the reduction of graphene oxide to graphene. In this paper, the graphene-Cu composite film was directly electrodeposited from the electrolyte containing multilayer graphene nanosheets through pulse electrodeposition under ultrasonic stirring, which was compatible with MEMS process. The experimental results indicated that the graphene-Cu composite film in this study had much less defects density than that in the reported literature. Micromachining technology is used to test the thermal conductivity, electrical resistivity and mechanical property of the composite film. Compared to pure Cu film, the mechanical property of the graphene-Cu composite film was remarkably increased while the electrical property and thermal property were comparable. (C) 2016 Elsevier B.V. All rights reserved.