• 文献标题:   Large area fabrication of graphene nanoribbons by wetting transparency-assisted block copolymer lithography
  • 文献类型:   Article
  • 作  者:   KATSUMATA R, YOGEESH MN, WONG HL, ZHOU SX, SIRARD SM, HUANG T, PINER RD, WU ZL, LI W, LEE AL, CARLSON MC, MAHER MJ, AKINWANDE D, ELLISON CJ
  • 作者关键词:   graphene, nanoribbon, block copolymer
  • 出版物名称:   POLYMER
  • ISSN:   0032-3861 EI 1873-2291
  • 通讯作者地址:   Univ Texas Austin
  • 被引频次:   3
  • DOI:   10.1016/j.polymer.2016.12.034
  • 出版年:   2017

▎ 摘  要

Patterning graphene into nanoribbons (graphene nanoribbons, GNR) allows for tunability in the emerging fields of plasmonic devices in the mid-infrared and terahertz regime. However, the fabrication processes of GNR arrays for plasmonic devices often include a low-throughput electron beam lithography step that cannot be easily scaled to large areas. In this study, we developed a GNR fabrication method using block copolymer (BCP) lithography that takes advantage of the wetting transparency of graphene. One major advantage of this method is that the self-assembled domains of the polystyrene-block-poly(methyl methacrylate) BCP are oriented perpendicularly directly on top of the graphene where they can later serve as an etch mask. Large area (cm(2) scale, 3 mu m x 3 gm defect-free area) 13-51 nm wide GNR arrays were successfully fabricated using this scalable protocol. This wetting transparency-assisted GNR fabrication method could be useful for high-throughput production of various plasmonic devices, including biosensors, and photodetectors. (C) 2016 Elsevier Ltd. All rights reserved.