• 文献标题:   Mechanical cleaning of graphene
  • 文献类型:   Article
  • 作  者:   GOOSSENS AM, CALADO VE, BARREIRO A, WATANABE K, TANIGUCHI T, VANDERSYPEN LMK
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Delft Univ Technol
  • 被引频次:   85
  • DOI:   10.1063/1.3685504
  • 出版年:   2012

▎ 摘  要

Contamination of graphene due to residues from nanofabrication often introduces background doping and reduces electron mobility. For samples of high electronic quality, post-lithography cleaning treatments are therefore needed. We report that mechanical cleaning based on contact mode atomic force microscopy removes residues and significantly improves the electronic properties. A mechanically cleaned dual-gated bilayer graphene transistor with hexagonal boron nitride dielectrics exhibited a mobility of similar to 36 000 cm(2)/Vs at low temperature. (C) 2012 American Institute of Physics. [doi:10.1063/1.3685504]