▎ 摘　　要

It has been noticed that interactions between the electron beam irradiation (EBI) and the sample surface during SEM-based mapping processes can produce a contaminated region on the sample surface, but there are not enough experimental results available to directly demonstrate it and its effect on surface properties. In this paper, the effect of EBI during electron backscatter diffraction (EBSD) on the surface of 90Cu10Ni alloy was investigated using atomic force microscopy/scanning Kelvin probe force microscopy (AFM/SKPFM), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, etc. The results revealed that a graphene film was formed on the EBSD mapped area which was different in structure and anti-corrosion performance from the artificial carbon layer. Remarkable protectiveness of the graphene film over the substrate against corrosion was demonstrated by immersion tests in both acidic and alkaline NaCl solution. The formation mechanism and structural features of the graphene film formed on the EBSD mapped area were discussed, and the effect of two-pass EBSD mapping was investigated shallowly. The present study provided a new insight into the EBI effects during EBSD and a promising method to grow graphene directly or pattern graphene in nanoscale on metal substrate.