• 文献标题:   Non-contact mobility measurements of graphene on silicon carbide
  • 文献类型:   Article
  • 作  者:   WHELAN PR, ZHAO XJ, PASTERNAK I, STRUPINSKI W, JEPSEN PU, BOGGILD P
  • 作者关键词:   epitaxial graphene, metrology, terahertz timedomain spectroscopy, mobility, hall measurement, 2d material
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Tech Univ Denmark
  • 被引频次:   3
  • DOI:   10.1016/j.mee.2019.03.022
  • 出版年:   2019

▎ 摘  要

Non-invasive measurement techniques are of utmost importance for characterization of atomically thin materials to speed up the measurement process while avoiding mechanical damage or contamination of the fragile materials. Terahertz time-domain spectroscopy (THz-TDS) provides non-contact measurement of the frequency dependent conductivity of thin films. Here, we expand the applicability of THz-TDS by spatially mapping the carrier density and mobility of epitaxial graphene grown on silicon carbide. The extracted values are compared to Hall measurements and agrees well for homogeneously conducting samples.